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Scan modules

Measuring range in x,y-direction [mm]

Resolution in x,y-direction [mm]

Positioning range in z-direction [mm]

Max. measuring speed [mm/s]

SC 50

50X50

0.5

100

50

SC 100

100x100

0.5

100

50

SC 150

150x150

0.5

100

50

SC 200

200x200

0.5

100

50

other dimensions on request

Sensors

Resolution z [μm]

Resolution x,y [μm]

Working distance [mm]

Measuring range in z-direction [mm]

Camera （optional）

Confocal point sensor

CF 4

0.02

1

4

1.0

off-axis

CF 13

0.02

1

13

1.0

（BMT5）

Autofocus sensor

AF 2

0.025/0.011^1）

1

2

1.5/0.65^1）

integrated

AF 5

0.025/0.011^1）

1

5

1.5/0.65^1）

（BMT3）

Chromatic white light sensor

CRT 5^2）

0.010

4

5

0.3

off-axis （BMT5）

CRT 12^2）

0.025

4

12

1.0

CRT 16^2）

0.075

8

16

3.0

Holographic sensor

CP 15

3.0

12

12

1.8

integrated

（BMT 4）

CP 42

6.0

15

42

8.0

CP 65

10.0

25

65

18.0

1） with restricted measuring range 2） with 1, 4 or 30 kHz measuring frequency available

Modules

System controller

High performance industrial PC, DVD-Writer, network card,

Windows XP Professional

Cabinet and work table MT 70

Stable container for electronic modules with work table

1550x800x750 （lxh in mm）

Granite measuring stand MP 100

Portal construction, 660x450x497 （lxh in mm） for SC 50 to SC 150

Granite measuring stand MP 200

Portal construction, 680x480x385 （lxh in mm） from SC 200

NF μsoft standard software

NanoFocus control and evaluation software, profile and topography

representation, roughness calculation compliant with DIN EN ISO

Options

NF 3D-Plus

Photo-realistic 3D presentation of topographical data （OpenGL）

NF Active X

Interface modules to program individual measurement processes and

calculations （Excel/VBA）

NF Hybridmaster

Automation tool for the use of μscan® in thick film production incl. SPC and

teach in module

NF Flatmaster

Automated measurement of straightness, flatness and warpage

NF Solder

Automated off-line measurement of fine pitch solderpaste print in SMT production

NF AutoScan

Automated measurement of profiles and surfaces at arbitrary measurement

points