Nicolet ECO 2000 FT-IR Metrology Tool
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- 公司名称 赛默飞世尔科技(原热电公司)
- 品牌
- 型号 Nicolet ECO 2000
- 产地 英国
- 厂商性质 生产厂家
- 更新时间 2017/7/27 15:45:42
- 访问次数 1790
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Nicolet ECO 2000 FT-IR Metrology Tool | ||
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Designed for 200 mm SMIF carriers or manual loading of 100 mm to 200 mm wafers, the NicoletTM ECOTM 2000 measures dopant concentration levels in dielectric films (BPSG, PSG, FSG, etc.), hydrogen levels in silicon nitride films, epitaxial film thickness, MEMS device thickness, and substitutional carbon and interstitial oxygen levels in silicon wafers. | ||
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Product Detail | ||
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Some of the highlights of the ECO 2000 include:
The ECO 2000 maintains the proven low cost of ownership and high reliability of our long-running series of ECO tools. Founded on our base of expertise in FT-IR technology, the ECO 2000 is also at the top of its class in performance. Thermo is committed to offering the most expertise and the best possible tools for FT-IR metrology. The ECO 2000 is another affirmation of this commitment. |
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